Development of Through-Wafer Interconnects for MEMS Deformable Mirrors
نویسندگان
چکیده
منابع مشابه
Through-Wafer Interconnects for High Degree of Freedom MEMS Deformable Mirrors
The development of an assembly and packaging process for MEMS deformable mirrors (DMs) with through wafer via (TWV) interconnects is presented. The approach consists of attaching a DM die with high-density TWV electrostatic actuator interconnects to an interposer substrate that fans out these connections for interfacing to conventional packaging technology.
متن کاملMEMS Deformable Mirror Actuators with Enhanced Reliability
MEMS deformable mirrors with thousands of actuators are under development for space-based operation, which require fault tolerant actuators that will not fail due to electrical overstress. We report on advances made in the development of MEMS deformable mirror actuators with enhanced reliability for space-based, high-contrast imaging instrumentation that eliminate irreversible actuator damage r...
متن کاملMEMS Deformable Mirrors for Astronomical Adaptive Optics
We report on the development of high actuator count, micro-electromechanical (MEMS) deformable mirrors designed for high order wavefront correction in ground and space-based astronomical adaptive optics instruments. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that has been used extensively to correct for ocular aberrations in retinal imagi...
متن کاملDesign , fabrication , and open - loop control of micro deformable mirrors for astronomical telescopes
The research product ...............................................................................................................................1 Deformable mirrors: current state-of-the-art...........................................................................................2 AO and MEMS DMs: relevance to astronomy and space science......................................................
متن کاملPayload characterization for CubeSat demonstration of MEMS deformable mirrors
Coronagraphic space telescopes require wavefront control systems for high-contrast imaging applications such as exoplanet direct imaging. High-actuator-count MEMS deformable mirrors (DM) are a key element of these wavefront control systems yet have not been flown in space long enough to characterize their on-orbit performance. The MEMS Deformable Mirror CubeSat Testbed is a conceptual nanosatel...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2011